carbon tetrafluoride，tetrafluoromethane
| 气体名称 | 四氟化碳，四氟甲烷 |
| Cas No. | 75-73-0 |
| 分子式 | CF4 |
| 纯度 | 99.9％ ~ 99.9999％ |
| 气瓶规格 | 高压钢瓶8L, 40L, 47L / 或长管车 |
Carbon tetrafluoride , also called tetrafluoromethane, a gas without odour and color, is used as an etching agent in plasma process of silicon, silicon oxide, tungsten. Also used widely in the surface cleaning of appliances, manufacturing of photovoltaic cell, laser technique, low temperature & refrigeration , gas insulation, detection of leakage, posture control of space rocket, cleaner of PCB, lubrication, brake fluid. It is applied in the metal smelting and plastics owing to its extremely chemical stability.
