{"id":393,"date":"2022-01-11T22:00:22","date_gmt":"2022-01-11T14:00:22","guid":{"rendered":"http:\/\/www.chinagases.cc\/?p=393"},"modified":"2022-01-15T11:02:38","modified_gmt":"2022-01-15T03:02:38","slug":"tezhongqitizaidianzixingyedeyingyong","status":"publish","type":"post","link":"http:\/\/www.chinagases.cc\/?p=393","title":{"rendered":"\u7279\u79cd\u6c14\u4f53\u5728\u7535\u5b50\u884c\u4e1a\u7684\u5e94\u7528"},"content":{"rendered":"\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile\"><figure class=\"wp-block-media-text__media\"><\/figure><div class=\"wp-block-media-text__content\">\n<figure class=\"wp-block-table\"><table><tbody><tr><td>\u2460<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>\u7279\u79cd\u6c14\u4f53\u5728\u7535\u5b50\u884c\u4e1a\u4e2d\u7684\u5e94\u7528<\/p>\n\n\n\n<h1>\u674e\u4e1c\u5347<\/h1>\n\n\n\n<p>(\u4e0a\u6d77\u6b63\u5e06\u8d85\u51c0\u6280\u672f\u6709\u9650\u516c\u53f8, \u4e0a\u6d77 \u95f5\u884c \u6625\u4e2d\u8def 56\u53f7&nbsp;&nbsp; 201108)<\/p>\n\n\n\n<p>\u6458\u8981:\u8bba\u8ff0\u4e86\u7279\u79cd\u6c14\u4f53\u5728\u96c6\u6210\u7535\u8def\u3001\u592a\u9633\u80fd\u7535\u6c60\u3001\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3001\u6db2\u6676\u663e\u793a\u5668\u548c\u5149\u7ea4\u9884\u5236\u68d2\u7b49\u7535\u5b50\u884c\u4e1a\u4e2d\u7684\u5e94\u7528, \u5e76\u5c31\u5176\u4f7f\u7528\u5b89\u5168\u63d0\u51fa\u4e86\u5efa\u8bae\u3002<\/p>\n\n\n\n<h1>0&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 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\u96c6\u6210\u7535\u8def\u5236\u9020<\/h1>\n\n\n\n<p>1.1&nbsp;&nbsp; \u96c6\u6210\u7535\u8def\u82af\u7247\u5236\u7a0b<\/p>\n\n\n\n<p>\u5fae\u82af\u7247\u5236\u9020\u6d89\u53ca\u7845\u7247\u5236\u5907 \u3001 \u7845\u7247\u5236\u9020 \u3001 \u7845\u7247\u6d4b<\/p>\n\n\n\n<p>\u8bd5 \/\u62e3\u9009\u3001 \u88c5\u914d\u4e0e\u5c01\u88c5\u3001 \u6700\u7ec8\u6d4b\u8bd5\u7b49\u4e94\u4e2a\u5927\u7684\u5236\u9020\u9636\u6bb5 \u3002\u8fd9\u4e94\u4e2a\u9636\u6bb5\u662f\u72ec\u7acb\u7684 , \u5728\u534a\u5bfc\u4f53\u516c\u53f8\u5185\u5747\u5177\u6709\u5927\u578b\u57fa\u7840\u8bbe\u65bd, \u5e76\u4e14\u6709\u63d0\u4f9b\u4e13\u7528\u5316\u5b66\u6750\u6599\u548c\u8bbe\u5907\u7684\u5de5\u4e1a\u652f\u6491\u7f51\u3002\u4ec5\u5728\u72ec\u7acb\u9636\u6bb5\u8fd0\u8425\u7684\u516c\u53f8 (\u50cf\u4ec5\u5236\u9020\u82af\u7247\u7684\u82af\u7247\u516c\u53f8 ), \u5fc5\u987b\u6ee1\u8db3\u4e1a\u754c\u6807\u51c6\u4ee5\u786e\u4fdd\u6700\u7ec8\u5fae\u82af\u7247\u6ee1\u8db3\u6027\u80fd\u76ee\u6807\u3002<\/p>\n\n\n\n<p>\u96c6\u6210\u7535\u8def\u662f\u5728\u7845\u7247\u5236\u9020\u5382\u4e2d\u5236\u9020\u5b8c\u6210\u7684 \u3002\u5176\u53ef\u5206\u4e3a\u516d\u4e2a\u72ec\u7acb\u7684\u751f\u4ea7\u533a (\u89c1\u56fe 1)\u3002\u8fd9\u516d\u4e2a\u4e3b\u8981\u7684\u751f\u4ea7\u533a\u548c\u76f8\u5173\u6b65\u9aa4\u4ee5\u53ca\u6d4b\u91cf\u5de5\u5177\u90fd\u5728\u7845\u7247\u5382\u7684\u8d85\u51c0<\/p>\n\n\n\n<p><\/p>\n\n\n\n<ul><li><br>\u95f4\u4e2d\u3002\u867d\u7136\u5bf9\u7845\u7247\u4e0a\u7684\u72ec\u7acb\u7ba1\u82af\u8fdb\u884c\u6d4b\u8bd5\u7684\u6d4b\u8bd5 \/ \u62e3\u9009\u533a\u5c31\u5728\u7845\u7247\u5382\u9644\u8fd1, \u4f46\u662f\u6d4b\u8bd5\u533a\u5e76\u4e0d\u4e0e\u7845\u7247\u5236\u9020\u5382\u7684\u5176\u5b83\u90e8\u5206\u5728\u540c\u4e00\u8d85\u51c0\u73af\u5883\u5f53\u4e2d \u3002\u88c5\u914d\u548c\u5c01\u88c5\u5219\u5728\u5176\u5b83\u5de5\u5382, \u751a\u81f3\u5728\u522b\u7684\u56fd\u5bb6\u5b8c\u6210 \u3002<\/li><\/ul>\n\n\n\n<ol type=\"1\"><li>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ol>\n\n\n\n<p>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u662f\u901a\u8fc7\u6c14\u4f53\u6df7\u5408\u7684\u5316\u5b66\u53cd\u5e94 , \u5728\u7845\u7247\u8868\u9762\u6c89\u79ef\u4e00\u5c42\u56fa\u4f53\u819c\u7684\u5de5\u827a\u3002\u7845\u7247\u8868\u9762\u53ca\u5176\u90bb\u8fd1\u7684\u533a\u57df\u88ab\u52a0\u70ed\u6765\u5411\u53cd\u5e94\u7cfb\u7edf\u63d0\u4f9b\u6240\u9700 \u7684\u80fd\u91cf \u3002\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u819c\u4e2d\u6240\u6709\u7684\u7269\u8d28\u90fd\u6e90\u4e8e\u5916\u90e8\u6c14\u6e90\u3002\u539f\u5b50\u6216\u5206\u5b50\u4f1a\u6c89\u79ef\u5728\u7845\u7247\u8868\u9762\u5f62\u6210\u8584\u819c \u3002<\/p>\n\n\n\n<p>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u901a\u5e38\u5305\u62ec\u6c14\u4f53\u4f20\u8f93\u81f3\u6c89\u79ef\u533a\u57df \u3001\u819c\u5148\u9a71\u7269\u7684\u5f62\u6210 \u3001 \u819c\u5148\u9a71\u7269\u9644\u7740\u5728\u7845\u7247\u8868\u9762\u3001 \u819c\u5148\u9a71\u7269\u7c98\u9644\u3001 \u819c\u5148\u9a71\u7269\u6269\u6563 \u3001 \u8868\u9762\u53cd\u5e94 \u3001 \u526f\u4ea7\u7269\u4ece\u8868\u9762\u79fb\u9664 \u3001 \u526f\u4ea7\u7269\u4ece\u53cd\u5e94\u8154\u79fb\u9664\u7b49\u516b\u4e2a\u4e3b\u8981\u6b65\u9aa4 \u3002\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u5e38\u7528\u7684\u6c14\u4f53\u5305\u62ec: SiH4&nbsp;\u3001 DCS\u3001 TCS\u3001<\/p>\n\n\n\n<p>SiCl4&nbsp;\u3001 TEOS\u3001 NH3&nbsp;\u3001 N2&nbsp;O\u3001 WF6&nbsp;\u3001 H2&nbsp;\u3001 O2&nbsp;&nbsp; \u7b49 \u3002\u53d1\u751f\u7684\u5316\u5b66\u53cd\u5e94\u901a\u5e38\u6709 :<\/p>\n\n\n\n<p>SiH4&nbsp; &nbsp;+ O2&nbsp;\u203b SiO2&nbsp; &nbsp;+H2 SiH4&nbsp;\u203b Si+ H2<\/p>\n\n\n\n<p>SiH4&nbsp; &nbsp;+ NH3&nbsp;\u203b Si3&nbsp;N4&nbsp; &nbsp;+ H2<\/p>\n\n\n\n<p>SiH4&nbsp; &nbsp;+ N2&nbsp;O\u203b SiO2&nbsp; &nbsp;+N2&nbsp; &nbsp;+H2 TEOS +O3&nbsp;\u203bSiO2&nbsp; &nbsp;+H2&nbsp;O + CO2 DCS +NH3&nbsp;\u203b Si3&nbsp;N4&nbsp; &nbsp;+HCl+H2<\/p>\n\n\n\n<ol type=\"1\"><li>\u523b\u8680\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ol>\n\n\n\n<p>\u523b\u8680\u662f\u91c7\u7528\u5316\u5b66\u548c\u7269\u7406\u65b9\u6cd5, \u6709\u9009\u62e9\u5730\u4ece\u7845\u7247\u8868\u9762\u53bb\u9664\u4e0d\u9700\u8981\u7684\u6750\u6599\u7684\u8fc7\u7a0b \u3002\u523b\u8680\u7684\u76ee\u7684\u662f\u5728\u6d82\u80f6\u7684\u7845\u7247\u4e0a\u6b63\u786e\u5730\u590d\u5236\u63a9\u819c\u56fe\u5f62\u3002\u523b\u8680\u5206\u4e3a\u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u3002\u6e7f\u6cd5\u523b\u8680\u662f\u5229\u7528\u6db2\u6001\u5316\u5b66\u8bd5\u5242\u6216\u6eb6\u6db2\u901a\u8fc7\u5316\u5b66\u53cd\u5e94\u8fdb\u884c\u523b\u8680 \u3002\u5e72\u6cd5\u523b\u8680\u5229\u7528\u4f4e\u538b\u653e\u7535\u4ea7\u751f\u7684\u7b49\u79bb\u5b50\u4f53\u4e2d\u7684\u79bb\u5b50\u6216\u6e38\u79bb\u57fa\u4e0e\u6750\u6599\u53d1\u751f\u5316\u5b66\u53cd\u5e94, \u6216\u901a\u8fc7\u8f70\u51fb\u7b49\u7269\u7406\u4f5c\u7528\u800c\u8fbe\u5230\u523b\u8680\u7684\u76ee\u7684 \u3002\u5176\u4e3b\u8981\u4ecb\u8d28\u662f\u6c14\u4f53 \u3002\u5e72\u6cd5\u523b\u8680\u7684\u4f18\u70b9\u662f\u5404\u5411\u5f02\u6027<\/p>\n\n\n\n<p>(\u5373\u5782\u76f4\u65b9\u5411\u523b\u8680\u901f\u7387\u8fdc\u5927\u4e8e\u6a2a\u5411\u901f\u7387 )\u660e\u663e \u3001 \u7279\u5f81\u5c3a\u5bf8\u63a7\u5236\u826f\u597d \u3001 \u5316\u5b66\u54c1\u4f7f\u7528\u548c\u5904\u7406\u8d39\u7528\u4f4e\u3001 \u8680\u523b\u901f\u7387\u9ad8 \u3001 \u5747\u5300\u6027\u597d\u3001 \u826f\u7387\u9ad8\u7b49 \u3002\u5e38\u7528\u7684\u5e72\u6cd5\u523b\u8680\u662f\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u3002<\/p>\n\n\n\n<p>\u7845\u7247\u7684\u523b\u8680\u6c14\u4f53\u4e3b\u8981\u662f\u6c1f\u57fa\u6c14\u4f53 , \u5305\u62ec CF4&nbsp;\u3001 CF4&nbsp; \/O2&nbsp;\u3001 SF6&nbsp;\u3001 C2&nbsp;F6&nbsp; \/O2&nbsp;\u3001 NF3&nbsp;\u7b49 \u3002\u4f46\u7531\u4e8e\u5176\u5404\u5411\u540c\u6027 , \u9009\u62e9\u6027\u8f83\u5dee , \u56e0\u6b64\u6539\u8fdb\u540e\u7684\u523b\u8680\u6c14\u4f53\u901a\u5e38\u5305\u62ec\u6c2f\u57fa (Cl2&nbsp;)\u548c\u6eb4\u57fa (Br2&nbsp;\u3001 HBr)\u6c14\u4f53\u3002\u53cd\u5e94\u540e\u7684\u751f\u6210\u7269\u5305\u62ec SiF4&nbsp;\u3001 SiCl4&nbsp; \u548c SiBr4&nbsp;\u3002\u94dd\u548c\u91d1\u5c5e\u590d\u5408\u5c42\u7684\u523b\u8680\u901a\u5e38\u91c7\u7528\u6c2f\u57fa\u6c14\u4f53 , \u5982 <strong>C<\/strong><strong> <\/strong>l4&nbsp;\u3001 Cl2&nbsp;\u3001 BCl3&nbsp;\u7b49 \u3002\u4ea7\u7269\u4e3b\u8981\u5305\u62ec AlCl3&nbsp;\u7b49 \u3002<\/p>\n\n\n\n<ol type=\"1\"><li>\u63ba\u6742\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ol>\n\n\n\n<p>\u63ba\u6742\u662f\u5c06\u9700\u8981\u7684\u6742\u8d28\u63ba\u5165\u7279\u5b9a\u7684\u534a\u5bfc\u4f53\u533a\u57df\u4e2d, \u4ee5\u6539\u53d8\u534a\u5bfc\u4f53\u7535\u5b66\u6027\u8d28, \u5f62\u6210 pn\u7ed3\u3001 \u7535\u963b\u3001\u6b27\u59c6\u63a5\u89e6\u7b49\u3002 p\u578b\u534a\u5bfc\u4f53\u662f\u5728\u7845 (\u9517 )\u5355\u6676\u4e2d\u63ba\u5165\u5c11\u91cf\u4e09\u4ef7\u5143\u7d20\u787c (\u6216\u94dd \u3001 \u94df\u3001 \u9553\u7b49), \u5219\u4e09\u4ef7\u5143\u7d20\u539f\u5b50\u5728\u6676\u683c\u4e2d\u7f3a\u5c11\u4e00\u4e2a\u4ef7\u7535\u5b50 , \u4ece\u800c\u9020\u6210\u4e00\u4e2a\u7a7a\u4f4d\u3002\u7a7a\u4f4d\u5f88\u5bb9\u6613\u4fd8\u83b7\u90bb\u8fd1\u56db\u4ef7\u539f\u5b50\u7684\u4ef7\u7535\u5b50 , \u5373\u5728\u90bb\u8fd1\u4ea7\u751f\u4e00\u4e2a\u7a7a\u7a74 , \u7a7a\u7a74\u53ef\u4ee5\u53c2\u4e0e\u5bfc\u7535 \u3002\u7a7a\u4f4d\u4fd8\u83b7\u7535\u5b50\u540e, \u4f7f\u6742\u8d28\u539f\u5b50\u6210\u4e3a\u8d1f\u79bb\u5b50 \u3002\u8d1f\u79bb\u5b50\u675f\u7f1a\u4e8e\u6676\u683c\u4e2d , \u4e0d\u53c2\u4e0e\u5bfc\u7535 \u3002\u63ba\u6742\u540e p\u578b\u534a\u5bfc\u4f53\u4e2d\u7684\u7a7a\u7a74\u6d53\u5ea6\u7b49\u4e8e\u63ba\u6742\u6d53\u5ea6\u3002\u5728 p\u578b\u534a\u5bfc\u4f53\u4e2d\u7a7a\u7a74\u662f\u591a\u6570\u8f7d\u6d41\u5b50, \u81ea\u7531\u7535\u5b50\u662f\u5c11\u6570\u8f7d\u6d41\u5b50 \u3002 n\u578b\u534a\u5bfc\u4f53\u662f\u5728\u7845<\/p>\n\n\n\n<p>(\u9517 )\u5355\u6676\u4e2d\u63ba\u5165\u5c11\u91cf\u4e94\u4ef7\u5143\u7d20\u78f7 (\u6216\u7837 \u3001 \u9511\u7b49 ),\u5219\u4e94\u4ef7\u5143\u7d20\u539f\u5b50\u5728\u6676\u683c\u4e2d\u591a\u4f59\u4e00\u4e2a\u4ef7\u7535\u5b50\u3002\u591a\u4f59\u4ef7\u7535\u5b50\u5bb9\u6613\u6210\u4e3a\u81ea\u7531\u7535\u5b50 , \u53ef\u4ee5\u53c2\u4e0e\u5bfc\u7535 \u3002\u63d0\u4f9b\u81ea\u7531\u7535\u5b50\u540e\u7684\u4e94\u4ef7\u6742\u8d28\u539f\u5b50\u56e0\u5e26\u6b63\u7535\u8377\u800c\u6210\u4e3a\u6b63\u79bb\u5b50\u3002 \u6b63\u79bb\u5b50\u675f\u7f1a\u4e8e\u6676\u683c\u4e2d, \u4e0d\u53c2\u4e0e\u5bfc\u7535\u3002\u63ba\u6742\u540e n\u578b\u534a\u5bfc\u4f53\u4e2d\u7684\u81ea\u7531\u7535\u5b50\u6d53\u5ea6\u7b49\u4e8e\u63ba\u6742\u6d53\u5ea6\u3002\u5728 n\u578b\u534a\u5bfc\u4f53\u4e2d\u81ea\u7531\u7535\u5b50\u662f\u591a\u6570\u8f7d\u6d41\u5b50 , \u7a7a\u7a74\u662f\u5c11\u6570\u8f7d\u6d41\u5b50 \u3002<\/p>\n\n\n\n<p>\u63ba\u6742\u5de5\u827a\u6709\u6269\u6563\u548c\u79bb\u5b50\u6ce8\u5165\u7b49\u3002\u6269\u6563\u662f\u5728\u5408\u9002\u7684\u6e29\u5ea6\u548c\u6d53\u5ea6\u68af\u5ea6\u4e0b , \u7528 <strong>I<\/strong>\u3001 V\u65cf\u5143\u7d20\u5360\u636e\u7845\u539f\u5b50\u4f4d\u7f6e\u3002\u79bb\u5b50\u6ce8\u5165\u662f\u5c06\u5177\u6709\u5f88\u9ad8\u80fd\u91cf\u7684\u6742\u8d28\u79bb\u5b50\u5c04\u5165\u534a\u5bfc\u4f53\u886c\u5e95\u4e2d\u3002\u5e38\u7528\u7684\u4e09\u4ef7\u63ba\u6742\u6c14\u4f53\u6709 B2&nbsp;H6&nbsp;\u3001<\/p>\n\n\n\n<p><strong>B<\/strong><strong> <\/strong>r3&nbsp;\u3001 BF3&nbsp;&nbsp; \u7b49 ,&nbsp; \u5e38 \u7528 \u7684 \u4e94 \u4ef7 \u63ba \u6742 \u6c14 \u4f53 \u6709 PH3&nbsp;\u3001<\/p>\n\n\n\n<p>POCl3&nbsp;\u3001 AsH3&nbsp;\u3001 SbCl5&nbsp;\u7b49 \u3002<\/p>\n\n\n\n<h1>2&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; \u592a\u9633\u80fd\u7535\u6c60<\/h1>\n\n\n\n<ul><li>\u592a\u9633\u80fd\u7535\u6c60\u7684\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>1839\u5e74\u6cd5\u56fd\u79d1\u5b66\u5bb6 EBecquerel\u53d1\u73b0\u6db2\u4f53\u7684\u5149\u751f\u4f0f\u7279\u6548\u5e94 (\u7b80\u79f0\u5149\u4f0f\u6548\u5e94)\u3002 1954\u5e74, \u7f8e\u56fd\u8d1d\u5c14\u5b9e\u9a8c\u5ba4\u7814\u5236\u51fa\u5355\u6676\u7845\u592a\u9633\u80fd\u7535\u6c60 \u3002\u592a\u9633\u80fd\u7535\u6c60\u7684\u539f\u7406\u662f\u57fa\u4e8e\u534a\u5bfc\u4f53\u7684\u5149\u4f0f\u6548\u5e94 , \u5c06\u592a\u9633\u8f90\u5c04\u76f4\u63a5\u8f6c\u6362\u6210\u7535\u80fd\u3002\u5728 pn\u7ed3\u7684\u5185\u5efa\u7535\u573a\u4f5c\u7528\u4e0b, n\u533a\u7684\u7a7a\u7a74\u5411 p\u533a\u8fd0\u52a8, \u800c p\u533a\u7684\u7535\u5b50\u5411 n\u533a\u8fd0\u52a8 , \u6700\u540e\u9020\u6210\u5728\u592a\u9633\u80fd\u7535\u6c60\u53d7\u5149\u9762 (\u4e0a\u8868\u9762 )\u6709\u5927\u91cf\u8d1f\u7535\u8377<\/p>\n\n\n\n<p>(\u7535\u5b50)\u79ef\u7d2f, \u800c\u5728\u7535\u6c60\u80cc\u5149\u9762 (\u4e0b\u8868\u9762 )\u6709\u5927\u91cf\u6b63\u7535\u8377 (\u7a7a\u7a74 )\u79ef\u7d2f\u3002\u5982\u5728\u7535\u6c60\u4e0a\u3001 \u4e0b\u8868\u9762\u505a\u4e0a\u91d1\u5c5e\u7535\u6781 , \u5e76\u7528\u5bfc\u7ebf\u63a5\u4e0a\u8d1f\u8f7d, \u5728\u8d1f\u8f7d\u4e0a\u5c31\u6709\u7535\u6d41\u901a\u8fc7 \u3002\u53ea\u8981\u592a\u9633\u5149\u7167\u4e0d\u65ad, \u8d1f\u8f7d\u4e0a\u5c31\u4e00\u76f4\u6709\u7535\u6d41\u901a\u8fc7\u3002\u592a\u9633\u80fd\u7535\u6c60\u7684\u5e94\u7528\u9996\u5148\u662f\u5728\u592a\u7a7a\u9886\u57df \u3002 1958 \u5e74, \u7f8e\u56fd\u9996\u9897\u4ee5\u592a\u9633\u80fd\u7535\u6c60\u4f5c\u4e3a\u4fe1\u53f7\u7cfb\u7edf\u7535\u6e90\u7684\u536b\u661f\u5148\u950b\u4e00\u53f7\u53d1\u5c04\u4e0a\u5929 \u3002\u968f\u540e , \u592a\u9633\u80fd\u7535\u6c60\u5728\u7167\u660e\u3001<\/p>\n\n\n\n<p>\u4fe1\u53f7\u706f\u3001 \u6c7d\u8f66 \u3001 \u7535\u7ad9\u7b49\u9886\u57df\u88ab\u5e7f\u6cdb\u91c7\u7528 \u3002\u7279\u522b\u662f\u4e0e<\/p>\n\n\n\n<p>LED\u6280\u672f\u7684\u7ed3\u5408 , \u7ed9\u592a\u9633\u80fd\u7535\u6c60\u7684\u666e\u53ca\u5e26\u6765\u4e86\u5de8\u5927\u6f5c\u529b \u3002<\/p>\n\n\n\n<ul><li>\u6676\u4f53\u7845\u592a\u9633\u80fd\u7535\u6c60\u751f\u4ea7\u5de5\u827a\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>\u5546\u4e1a\u5316\u751f\u4ea7\u7684\u6676\u4f53\u7845\u592a\u9633\u80fd\u7535\u6c60\u901a\u5e38\u91c7\u7528\u591a\u6676\u7845\u6750\u6599 \u3002\u7845\u7247\u7ecf\u8fc7\u8150\u8680\u5236\u7ed2, \u518d\u7f6e\u4e8e\u6269\u6563\u7089\u77f3\u82f1\u7ba1\u5185 , \u7528 POCl3&nbsp;\u6269\u6563\u78f7\u539f\u5b50, \u4ee5\u5728 p\u578b\u7845\u7247\u4e0a\u5f62\u6210\u6df1\u5ea6\u7ea6 0.5\u03bcm\u5de6\u53f3\u7684 n\u578b\u5bfc\u7535\u533a, \u5728\u754c\u9762\u5f62\u6210 pn\u7ed3 \u3002\u968f\u540e\u8fdb\u884c\u7b49\u79bb\u5b50\u523b\u8680\u523b\u8fb9 , \u53bb\u9664\u78f7\u7845\u73bb\u7483 \u3002\u63a5\u7740\u5728\u53d7\u5149\u9762\u4e0a\u901a\u8fc7 PECVD\u5236\u4f5c\u51cf\u53cd\u5c04\u819c ,&nbsp; \u5e76\u901a\u8fc7\u4e1d\u7f51\u5370\u5237\u70e7\u7ed3\u5de5\u827a\u5236\u4f5c\u4e0a\u4e0b\u7535\u6781\u3002<\/p>\n\n\n\n<p>\u6676\u4f53\u7845\u7535\u6c60\u7247\u751f\u4ea7\u4e2d\u7684\u6269\u6563\u5de5\u827a\u7528\u5230 POCl3&nbsp;\u548c O2&nbsp;\u3002\u51cf\u53cd\u5c04\u5c42 PECVD\u5de5\u827a\u7528\u5230 SiH4&nbsp;\u3001 NH3&nbsp;, \u523b\u8680\u5de5\u827a\u7528\u5230 CF4&nbsp;\u3002\u5176\u53d1\u751f\u7684\u5316\u5b66\u53cd\u5e94\u5206\u522b\u4e3a :<\/p>\n\n\n\n<p>POCl3&nbsp; &nbsp;+O2&nbsp;\u203b P2&nbsp;O5&nbsp; &nbsp;+Cl2 P2&nbsp;O5&nbsp; &nbsp;+Si\u203b SiO2&nbsp; &nbsp;+P<\/p>\n\n\n\n<p>SiH4&nbsp; &nbsp;+ NH3&nbsp;\u203b SiNx:H+H2<\/p>\n\n\n\n<p>CF4&nbsp; &nbsp;+O2&nbsp; &nbsp;+Si\u203b SiF4&nbsp; &nbsp;+CO2<\/p>\n\n\n\n<ul><li>\u8584\u819c\u592a\u9633\u80fd\u7535\u6c60\u751f\u4ea7\u5de5\u827a\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>\u5546\u4e1a\u5316\u751f\u4ea7\u7684\u8584\u819c\u592a\u9633\u80fd\u7535\u6c60\u5206\u4e3a\u975e\u6676\u7845 (a-<\/p>\n\n\n\n<p>Si)\u8584\u819c\u548c\u975e\u6676 \/\u5fae\u6676\u7845 (a-Si\/\u03bcc-Si)\u53e0\u5c42\u8584\u819c \u3002\u540e\u8005\u5bf9\u592a\u9633\u5149\u7684\u5438\u6536\u5229\u7528\u66f4\u5145\u5206\u3002\u5176\u751f\u4ea7\u5de5\u827a\u9996\u5148\u662f\u5728\u73bb\u7483\u57fa\u677f\u4e0a\u5236\u9020\u900f\u660e\u5bfc\u7535\u819c (TCO)\u3002\u4e00\u822c\u901a\u8fc7\u6e85\u5c04\u6216 LPCVD\u7684\u65b9\u6cd5\u3002\u7136\u540e\u518d\u901a\u8fc7 PECVD\u65b9\u6cd5\u6c89\u79ef p\u578b\u3001 i\u578b\u548c n\u578b\u8584\u819c \u3002\u6700\u540e\u7528\u6e85\u5c04\u505a\u80cc\u7535\u6781 \u3002<\/p>\n\n\n\n<p>\u975e\u6676\u7845\u592a\u9633\u80fd\u7535\u6c60\u5728 LPCVD\u6c89\u79ef TCO\u5de5\u5e8f\u7528\u5230 DEZn\u3001 B2&nbsp;H6&nbsp;;\u975e\u6676 \/\u5fae\u6676\u7845\u6c89\u79ef\u5de5\u5e8f\u7528\u5230 SiH4&nbsp;\u3001<\/p>\n\n\n\n<p>PH3&nbsp; \/H2&nbsp;\u3001 TMB\/H2&nbsp;\u3001 CH4&nbsp;\u3001 NF3&nbsp;&nbsp; \u7b49\u3002\u5176\u53d1\u751f\u7684\u5316\u5b66\u53cd\u5e94\u5206\u522b\u4e3a:<\/p>\n\n\n\n<p>Zn(C2&nbsp;H5&nbsp;)2&nbsp; &nbsp;+H2&nbsp;O\u203b C2&nbsp;H6&nbsp; &nbsp;+ ZnO SiH4&nbsp; &nbsp;+CH4&nbsp;\u203b a-SiC:H + H2<\/p>\n\n\n\n<p>SiH4&nbsp;\u203b a-Si:H +H2<\/p>\n\n\n\n<h1>3&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; \u5316\u5408\u7269\u534a\u5bfc\u4f53<\/h1>\n\n\n\n<ul><li>\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7684\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>\u5316\u5408\u7269\u534a\u5bfc\u4f53\u901a\u5e38\u7531 <strong>I<\/strong>I\u3001 V\u65cf\u5143\u7d20\u7684\u5316\u5408\u7269\u53cd\u5e94\u5f62\u6210\u7684\u5316\u5408\u7269,&nbsp; \u5177\u5907\u534a\u5bfc\u4f53\u7684\u6027\u8d28 , \u5305\u62ec<\/p>\n\n\n\n<p>GaAs\u3001 InP\u3001 GaN\u3001 AlGaAs\u7b49 \u3002\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7684\u4e3b\u8981\u7528\u9014\u5305\u62ec\u5149\u7535 (\u53d1\u5149\u4e8c\u6781\u7ba1 LED)\u3001 \u5fae\u7535\u5b50 (\u65e0\u7ebf\u901a\u4fe1\u3001 \u5149\u7ea4\u901a\u4fe1 \u3001 \u79fb\u52a8\u901a\u4fe1\u3001 GPS\u5168\u7403\u5bfc\u822a )\u3001\u519b\u4e8b\u9886\u57df (\u5f02\u8d28\u7ed3\u53cc\u6781\u6676\u4f53\u7ba1 HBT\u3001 \u9ad8\u7535\u5b50\u8fc1\u79fb\u7387\u6676\u4f53\u7ba1 HEMT)\u3001 \u533b\u7597\u9886\u57df (UV\u6740\u83cc)\u7b49\u3002<\/p>\n\n\n\n<ul><li>MOCVD\/LED\u751f\u4ea7\u5de5\u827a\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>\u91d1\u5c5e\u6709\u673a\u7269\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (MOCVD)\u662f 1968 \u5e74\u7531\u7f8e\u56fd\u6d1b\u514b\u5a01\u5c14\u516c\u53f8\u63d0\u51fa\u7684\u5236\u5907\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5355\u6676\u8584\u819c\u7684\u6280\u672f \u3002\u53d1\u5149\u4e8c\u6781\u7ba1 (LED)\u662f\u7531 <strong>I<\/strong>\u3001 V \u65cf\u5316\u5408\u7269 , \u5982 GaAs(\u7837\u5316\u9553 )\u3001 GaP (\u78f7\u5316\u9553 )\u3001<\/p>\n\n\n\n<p>GaAsP(\u78f7\u7837\u5316\u9553 )\u7b49\u534a\u5bfc\u4f53\u5236\u6210\u7684,&nbsp; \u5176\u6838\u5fc3\u662f<\/p>\n\n\n\n<p>pn\u7ed3\u3002\u56e0\u6b64\u5b83\u5177\u6709\u4e00\u822c pn\u7ed3\u7684\u7279\u6027 , \u5373\u6b63\u5411\u5bfc\u901a, \u53cd\u5411\u622a\u6b62\u3001 \u51fb\u7a7f\u7279\u6027 \u3002\u6b64\u5916 , \u5728\u4e00\u5b9a\u6761\u4ef6\u4e0b, \u5b83\u8fd8\u5177\u6709\u53d1\u5149\u7279\u6027 \u3002\u5728\u6b63\u5411\u7535\u538b\u4e0b, \u7535\u5b50\u7531 n\u533a\u6ce8\u5165 p\u533a, \u7a7a\u7a74\u7531 p\u533a\u6ce8\u5165 n\u533a\u3002\u8fdb\u5165\u5bf9\u65b9\u533a\u57df\u7684\u5c11\u6570\u8f7d\u6d41\u5b50\u4e00\u90e8\u5206\u4e0e\u591a\u6570\u8f7d\u6d41\u5b50\u590d\u5408\u800c\u53d1\u5149\u3002<\/p>\n\n\n\n<p>\u56fe 2 MOCVD\u5236\u9020\u6a21\u578bFig.2&nbsp;&nbsp; &nbsp;MOCVDmanufacturingmodel<\/p>\n\n\n\n<p>LED\u7684\u5236\u9020\u5de5\u827a\u9996\u5148\u662f MOCVD\u5916\u5ef6\u7247\u5236\u4f5c ; \u7136\u540e\u5bf9 LED pn\u7ed3\u7684\u4e24\u4e2a\u7535\u6781\u8fdb\u884c\u52a0\u5de5, \u5305\u62ec\u6e05\u6d17 \u3001 \u84b8\u9540\u3001 \u5149\u523b \u3001 \u8680\u523b\u3001 \u7194\u5408 \u3001 \u7814\u78e8 ;\u6700\u540e\u8fdb\u884c\u5212<\/p>\n\n\n\n<p>\u7247\u3001 \u6d4b\u8bd5\u548c\u5206\u9009, \u5c31\u53ef\u4ee5\u5f97\u5230\u6240\u9700\u7684 LED\u82af\u7247\u3002<\/p>\n\n\n\n<p>MOCVD\u5de5\u827a\u7528\u5230 AsH3&nbsp;\u3001 PH3&nbsp;\u3001 NH3&nbsp;\u3001 N2&nbsp;\u3001 H2&nbsp; \u7b49\u6c14\u4f53\u3002\u6c14\u4f53\u53cd\u5e94\u5ba4\u6a21\u578b\u89c1\u56fe 2\u3002\u523b\u8680\u5de5\u827a\u7528\u5230 BCl3&nbsp;\u3001<\/p>\n\n\n\n<ul><li><br>Cl2\u00a0\u7b49 \u3002<\/li><\/ul>\n\n\n\n<h1>4&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; \u6db2\u6676\u663e\u793a\u5668<\/h1>\n\n\n\n<p>\u5728\u6c14\u76f8\u6c89\u79ef\u5de5\u827a\u83b7\u5f97\u82af\u68d2\u7684\u57fa\u7840\u4e0a\u52a0\u5165\u5916\u5305\u5c42<\/p>\n\n\n\n<p>(Over-cla<strong>d<\/strong>ing), \u5236\u6210\u5149\u7ea4\u9884\u5236\u68d2\u3002<\/p>\n\n\n\n<p>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7684\u6838\u5fc3\u53cd\u5e94\u662f SiCl\u548c GeCl\u5728<\/p>\n\n\n\n<p>4&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; 4<\/p>\n\n\n\n<ul><li>TFT\/LCD\u7684\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>TFT(\u8584\u819c\u6676\u4f53\u7ba1 ) \/ LCD (\u6db2\u6676\u663e\u793a\u5668 )\u7684\u6bcf\u4e2a\u50cf\u7d20\u70b9\u90fd\u662f\u7531\u96c6\u6210\u5728\u81ea\u8eab\u4e0a\u7684 TFT\u6765\u63a7\u5236 , \u662f\u6709\u6e90\u50cf\u7d20\u70b9\u3002\u56e0\u6b64 , \u5176\u5177\u6709\u4f53\u79ef\u5c0f \u3001 \u91cd\u91cf\u8f7b \u3001 \u4f4e\u8f90\u5c04\u3001 \u4f4e\u8017\u7535\u91cf \u3001 \u5168\u5f69\u5316 \u3001 \u901f\u5ea6\u5feb\u3001 \u5bf9\u6bd4\u5ea6\u548c\u4eae\u5ea6\u9ad8 \u3001 \u5c4f\u5e55\u89c2\u5bdf\u89d2\u5ea6\u5927 \u3001 \u5206\u8fa8\u7387\u9ad8\u7b49\u4f18\u70b9, \u662f\u76ee\u524d\u4e3b\u6d41\u7684\u5e73\u9762\u663e\u793a\u8bbe\u5907\u3002<\/p>\n\n\n\n<ul><li>TFT\/LCD\u751f\u4ea7\u5de5\u827a\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>TFT\/LCD\u7684\u751f\u4ea7\u5305\u62ec TFT\u9635\u5217&nbsp; (\u5305\u62ec\u8584\u819c \u3001\u5149\u523b\u3001 \u523b\u8680 )\u3001 \u5f69\u8272\u6ee4\u5149\u7247 (\u5305\u62ec\u9ed1\u77e9\u9635\u819c \u3001 \u7ea2\u7eff\u84dd\u819c\u3001 \u900f\u660e\u5bfc\u7535\u5c42 )\u3001 \u9762\u677f\u3001 \u6a21\u7ec4\u7b49\u5de5\u5e8f \u3002\u8584\u819c\u5de5\u5e8f , \u901a\u8fc7\u5316\u5b66\u6c14\u76f8\u6c89\u79ef, \u5728\u73bb\u7483\u57fa\u677f\u4e0a\u6c89\u79ef SiO2&nbsp;\u3001<\/p>\n\n\n\n<p>SiNx\u3001 a-Si\u3001 n\u578b a-Si\u8584\u819c\u3002\u4f7f\u7528\u7684\u7279\u79cd\u6c14\u4f53\u6709<\/p>\n\n\n\n<p>SiH4&nbsp;\u3001 PH3&nbsp;\u3001 NH3&nbsp;\u3001 NF3&nbsp;&nbsp; \u7b49\u3002\u5e72\u6cd5\u523b\u8680\u5de5\u5e8f , \u5728\u7b49\u79bb\u5b50\u6c14\u6001\u6c1b\u56f4\u4e2d\u9009\u62e9\u6027\u8150\u8680\u57fa\u6750 \u3002\u901a\u5e38\u91c7\u7528 SF6&nbsp;\u3001<\/p>\n\n\n\n<p>HCl\u3001 Cl2&nbsp; \u7b49\u6c14\u4f53\u3002<\/p>\n\n\n\n<h1>5&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; \u5149&nbsp; \u7ea4<\/h1>\n\n\n\n<ul><li>\u5149\u7ea4\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>\u5149\u7ea4\u662f\u5f53\u524d\u4fe1\u606f\u4f20\u8f93\u4e2d\u65e0\u53ef\u66ff\u4ee3\u7684\u4f20\u8f93\u4ecb\u8d28 , \u5168\u7403 80%\u4ee5\u4e0a\u4fe1\u606f\u91cf\u901a\u8fc7\u5149\u7ea4\u4f20\u8f93\u3002\u5149\u7ea4\u7684\u4e3b\u8981\u6210\u5206\u662f SiO2&nbsp;\u3002\u4ece\u76ee\u524d\u5236\u9020\u5149\u7ea4\u7684\u5de5\u827a\u6765\u770b, \u5176\u4e3b\u8981\u539f\u6750\u6599\u662f SiCl4&nbsp;\u3002\u5f53\u7136\u6839\u636e\u5149\u7ea4\u7684\u54c1\u79cd\u4e0d\u540c , \u7c7b\u578b\u4e0d\u540c , \u82af\u5c42\u63ba\u6742\u5fae\u91cf\u5143\u7d20\u7684\u6bd4\u4f8b\u548c\u6210\u5206\u4e5f\u4f1a\u4e0d\u540c \u3002\u800c\u82af\u5c42\u63ba\u6742\u7684\u4e0d\u540c\u51b3\u5b9a\u7740\u5149\u7ea4\u7684\u7279\u6027 \u3002\u6839\u636e\u56fd\u9645\u7535\u4fe1\u8054\u76df (ITU)\u7684\u76f8\u5173\u89c4\u5b9a, \u5149\u7ea4\u7684\u79cd\u7c7b\u4e3b\u8981\u5206\u4e3a\u591a\u6a21\u5149\u7ea4 (G.651\u5149\u7ea4 , \u4e3b\u8981\u8fd0\u7528\u4e8e\u5c40\u57df\u7f51\u7684\u4f20\u8f93)\u3001 \u5355\u6a21\u5149\u7ea4 (G.652 \u4e3b\u8981\u8fd0\u7528\u4e8e\u57ce\u57df\u7f51 \u3001 \u5c40\u57df\u7f51\u548c\u957f\u9014\u5e72\u7ebf\u7684\u4f20\u8f93 )\u3001 \u8272 \u6563\u4f4d\u79fb\u5355\u6a21\u5149\u7ea4(G.653)\u548c\u622a\u6b62\u6ce2\u957f\u5355\u6a21\u5149\u7ea4 (G.654)\u3001 \u975e\u96f6\u8272\u6563\u4f4d\u79fb\u5355\u6a21\u5149\u7ea4 (G.655\/G.656, \u4e3b\u8981\u7528\u4e8e\u957f\u9014\u5e72\u7ebf )\u3002<\/p>\n\n\n\n<ul><li>\u5149\u7ea4\u9884\u5236\u68d2\u7684\u751f\u4ea7\u5de5\u827a\u548c\u6c14\u4f53\u5e94\u7528<\/li><\/ul>\n\n\n\n<p>\u901a\u4fe1\u7528\u5149\u7ea4\u5927\u591a\u6570\u662f\u7531\u77f3\u82f1\u6750\u6599\u7ec4\u6210\u7684\u3002\u5149\u7ea4\u5236\u9020\u8fc7\u7a0b\u5305\u62ec\u5149\u7ea4\u9884\u5236\u68d2\u5236\u5907\u3001 \u5149\u7ea4\u62c9\u4e1d\u7b49\u6b65\u9aa4 \u3002\u76ee\u524d, \u5149\u7ea4\u9884\u5236\u68d2\u5236\u5907\u6700\u5e38\u7528\u7684\u662f\u4e24\u6b65\u6cd5 :\u7b2c\u4e00\u6b65\u91c7\u7528\u6c14\u76f8\u6c89\u79ef\u5de5\u827a, \u5982\u5916\u90e8\u6c14\u76f8\u6c89\u79ef\u6cd5 (OVD)\u3001\u8f74\u5411\u6c14\u76f8\u6c89\u79ef\u6cd5 (VAD)\u3001 \u6539\u8fdb\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5<\/p>\n\n\n\n<p>(MCVD)\u3001 \u7b49\u79bb\u5b50\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5 (PCVD)\u7b49 ,<\/p>\n\n\n\n<p>\u6765\u751f\u4ea7\u5149\u7ea4\u9884\u5236\u68d2\u7684\u82af\u68d2 (Core-rod);\u7b2c\u4e8c\u6b65\u662f<\/p>\n\n\n\n<p>\u6c22\u3001 \u6c27\u706b\u7130\u73af\u5883\u4e0b, \u6c34\u89e3\u751f\u6210 SiO2&nbsp; \u548c GeO2&nbsp;&nbsp; \u7c89\u5c18<\/p>\n\n\n\n<p>(SOOT)\u3002\u5176\u4e2d SiCl4&nbsp;\u3001 GeCl4&nbsp; \u9700\u8981\u52a0\u70ed , \u7528\u84b8\u6c14\u6216\u6c29\u6c14\u643a\u5e26\u7684\u65b9\u5f0f\u9001\u5165\u53cd\u5e94\u5ba4&nbsp; \u3002\u5e38\u7528\u7684\u5176\u5b83\u7279\u6c14\u8fd8\u6709<\/p>\n\n\n\n<p>CH4&nbsp;\u3001 CF4&nbsp;\u3001 Cl2&nbsp;\u3001 SF6&nbsp;\u7b49 \u3002<\/p>\n\n\n\n<h1>6&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; \u7279\u6c14\u4f7f\u7528\u5b89\u5168<\/h1>\n\n\n\n<p>\u9996\u5148 , \u5e94\u5bf9\u7279\u6c14\u7684\u5371\u5bb3\u6027\u8fdb\u884c\u5206\u6790 , \u901a\u8fc7\u672c\u8d28\u5b89\u5168\u8bbe\u8ba1 , \u6d88\u9664\u5b89\u5168\u9690\u60a3\u3002\u6839\u636e\u884c\u4e1a\u89c4\u8303, \u5bf9\u7279\u6c14\u623f\u9009\u5740\u3001 \u5b89\u5168\u95f4\u8ddd \u3001 \u9632\u706b\u5206\u533a\u3001 \u623f\u95f4\u901a\u98ce\u3001 \u7535\u6c14\u9632\u7206\u7b49\u8fdb\u884c\u8bc4\u4f30 \u3002\u7ba1\u9053\u8bbe\u8ba1\u5e94\u8fdb\u884c\u4fdd\u538b\u548c\u6c26\u6d4b\u6f0f, \u786e\u4fdd\u7cfb\u7edf\u5bc6\u95ed\u6027 \u3002\u94a2\u74f6\u548c\u7ba1\u9053\u9600\u95e8\u5e94\u9009\u7528\u9694\u819c\u6216\u6ce2\u7eb9\u7ba1\u5bc6\u5c01\u9600\u95e8\u3002\u7ba1\u9053\u7cfb\u7edf\u5e94\u91c7\u7528\u710a\u63a5\u7cfb\u7edf , \u673a\u68b0\u63a5\u5934\u5747\u5e94\u7f6e\u4e8e\u62bd\u98ce\u7f69\u5185 \u3002\u6392\u653e\u6c14\u4f53\u5e94\u8fdb\u884c\u5b89\u5168\u5904\u7406\u3002\u6c14\u4f53\u8f93\u9001\u8bbe\u5907\u5177\u6709\u7d27\u6025\u5207\u65ad\u529f\u80fd\u3002\u64cd\u4f5c\u5e94\u9075\u5faa\u6807\u51c6\u64cd \u4f5c\u89c4\u7a0b\u3002<\/p>\n\n\n\n<p>\u5176\u6b21 , \u91c7\u7528\u76d1\u6d4b\u624b\u6bb5, \u9884\u9632\u4e8b\u6545\u53d1\u751f\u3002\u8bbe\u7f6e\u6c14\u4f53\u6cc4\u6f0f\u4fa6\u6d4b\u5668 , \u76d1\u63a7\u6c14\u4f53\u6cc4\u6f0f\u3002\u53ef\u71c3\u6027\u6c14\u4f53\u5e94\u8bbe\u7f6e\u9ad8\u6e29\u6216\u706b\u7130\u4fa6\u6d4b\u5668 \u3002\u5371\u9669\u6c14\u4f53\u5e94\u8bbe\u7f6e\u8fc7\u6d41\u5f00\u5173\u3002\u6c14\u67dc\u5e94\u8fdb\u884c\u8d1f\u538b\u76d1\u6d4b , \u9632\u6b62\u62bd\u98ce\u7cfb\u7edf\u7684\u5931\u6548\u3002\u4fa6\u6d4b\u7cfb\u7edf\u5e94\u4e0e\u62a5\u8b66\u548c\u7d27\u6025\u5207\u65ad\u8fde\u9501 \u3002\u7cfb\u7edf\u8fd8\u5e94\u8fdb\u884c\u8fdc\u7a0b\u76d1\u63a7\u3002\u76d1\u63a7\u7cfb\u7edf\u5e94\u8bbe\u7f6e\u4e0d\u95f4\u65ad\u7535\u6e90 \u3002<\/p>\n\n\n\n<p>\u6700\u540e , \u91c7\u7528\u51cf\u707e\u63aa\u65bd, \u964d\u4f4e\u4e8b\u6545\u540e\u679c\u3002\u8bbe\u7f6e\u6d88\u9632\u55b7\u6dcb\u7cfb\u7edf, \u5bf9\u6c14\u4f53\u94a2\u74f6\u8fdb\u884c\u51b7\u5374\u964d\u6e29 \u3002\u8bbe\u7f6e\u8fdc\u7a0b\u7d27\u6025\u5207\u65ad\u6309\u94ae \u3002\u62bd\u98ce\u7cfb\u7edf\u5e94\u8003\u8651\u4e8b\u6545\u6392\u98ce, \u4e14\u5728\u4e0d\u540c\u7684\u5371\u9669\u548c\u9632\u706b\u5206\u533a\u4e4b\u95f4\u8bbe\u7f6e\u98ce\u9600\u3002\u5efa\u7b51\u8bbe\u8ba1\u5e94\u5145 \u5206\u8003\u8651\u6cc4\u7206\u9762\u79ef\u3001 \u9632\u706b\u5899 \u3001 \u7d27\u6025\u51fa\u53e3\u3001 \u6d88\u9632\u901a\u9053\u7b49\u3002\u5efa\u7acb\u5e94\u6025\u53cd\u5e94\u7cfb\u7edf , \u5e76\u5b9a\u671f\u6f14\u7ec3, \u6700\u5927\u9650\u5ea6\u51cf\u8f7b\u4eba\u5458\u4f24\u4ea1\u3001 \u8d22\u4ea7\u635f\u5931\u548c\u73af\u5883\u7834\u574f\u3002<\/p>\n\n\n\n<p>\u4f5c\u8005\u7b80\u4ecb : \u674e\u4e1c\u5347(1968-), \u7537, \u6c49\u65cf, \u6cb3\u5357\u4eba, \u9ad8\u7ea7\u5de5\u7a0b\u5e08\u3002<\/p>\n<\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u2460 \u7279\u79cd\u6c14\u4f53\u5728\u7535\u5b50\u884c\u4e1a\u4e2d\u7684\u5e94\u7528 \u674e\u4e1c\u5347 (\u4e0a\u6d77\u6b63\u5e06\u8d85\u51c0\u6280\u672f\u6709\u9650\u516c\u53f8, \u4e0a\u6d77 \u95f5\u884c \u6625\u4e2d\u8def 56\u53f7&nbsp;&#038; &hellip; <\/p>\n<p class=\"link-more\"><a href=\"http:\/\/www.chinagases.cc\/?p=393\" class=\"more-link\">\u7ee7\u7eed\u9605\u8bfb<span class=\"screen-reader-text\">\u201c\u7279\u79cd\u6c14\u4f53\u5728\u7535\u5b50\u884c\u4e1a\u7684\u5e94\u7528\u201d<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_mi_skip_tracking":false},"categories":[1],"tags":[29],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.6 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\r\n<title>\u7279\u79cd\u6c14\u4f53\u5728\u7535\u5b50\u884c\u4e1a\u7684\u5e94\u7528 - \u8d5b\u7f8e\u7279 SUMMIT CHEMICALS &amp; GASES LTD<\/title>\r\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\r\n<link rel=\"canonical\" href=\"http:\/\/www.chinagases.cc\/?p=393\" \/>\r\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\r\n<meta property=\"og:type\" content=\"article\" \/>\r\n<meta property=\"og:title\" content=\"\u7279\u79cd\u6c14\u4f53\u5728\u7535\u5b50\u884c\u4e1a\u7684\u5e94\u7528 - \u8d5b\u7f8e\u7279 SUMMIT CHEMICALS &amp; 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