{"id":191,"date":"2021-11-18T18:06:53","date_gmt":"2021-11-18T10:06:53","guid":{"rendered":"http:\/\/www.chinagases.cc\/?p=191"},"modified":"2025-07-09T09:16:33","modified_gmt":"2025-07-09T01:16:33","slug":"fuqi-f2","status":"publish","type":"post","link":"http:\/\/www.chinagases.cc\/?p=191","title":{"rendered":"\u6c1f\u6c14 F2"},"content":{"rendered":"\n<p>\u6280\u672f\u6307\u6807<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table><tbody><tr><td>\u9879 \u76ee<\/td><td>\u8d28 \u91cf \u6307 \u6807<\/td><\/tr><tr><td>F<sub>2<\/sub> % \uff08V\/V\uff09 \u2265<\/td><td>99.0<\/td><\/tr><tr><td>CF<sub>4 <\/sub>% (V\/V) \u2264<\/td><td>0.05<\/td><\/tr><tr><td>\u7a7a\u6c14 % (V\/V) \u2264<\/td><td>0.45<\/td><\/tr><tr><td>HF % (V\/V) \u2264<\/td><td>0.5<\/td><\/tr><\/tbody><\/table><figcaption>\u65e5\u5e38\u751f\u4ea7\u4e0a\uff0c\u4e3a\u4e86\u4fdd\u8bc1\u5b89\u5168\uff0c\u7eaf\u6c1f\u6c14\u4e0d\u662f\u76f4\u63a5\u538b\u7f29\u5145\u74f6\uff0c\u800c\u662f\u5148\u548c\u6c2e\u6c14\u6df7\u5408\u540e\u964d\u4f4e\u5b83\u7684\u6d53\u5ea6\u540e\u4ee5\u6df7\u5408\u6c14\u5f62\u6001\u5145\u74f6\u3002<\/figcaption><\/figure>\n\n\n\n<p>\u7535\u89e3\u69fd\u793a\u610f\u56fe<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" width=\"222\" height=\"227\" src=\"http:\/\/www.chinagases.cc\/wp-content\/uploads\/2021\/12\/image.png\" alt=\"\" class=\"wp-image-305\"\/><figcaption>\u6c1f\u6c14\u751f\u4ea7\u7684\u6838\u5fc3\u88c5\u7f6e-\u7535\u89e3\u69fd<\/figcaption><\/figure>\n\n\n\n<p>\u7528\u6237\u73b0\u573a\u751f\u4ea7\u6c1f\u6c14F<sub>2<\/sub>-\u5316\u5b66\u6c14\u76f8\u6c89\u79efCVD\u5de5\u827a\u7684\u6d01\u51c0\u9ad8\u6548\u6e05\u6d17\u5de5\u827a<\/p>\n\n\n\n<p>\uff08\u7f16\u8005\u6309\uff1a\u8fd9\u4e2a\u5173\u4e8e\u73b0\u573a\u5236\u6c1f\u7684\u77ed\u6587\uff0c\u4e0d\u4ee3\u8868\u672c\u7f16\u8f91\u89c2\u70b9\uff09<\/p>\n\n\n\n<p>\u5728\u5fae\u7535\u5b50\u4ea7\u54c1\u8584\u819c\u5236\u5907\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c92\u548c\u5206\u5b50\u6e05\u6d01\u5ea6\u5bf9\u9ad8\u5de5\u827a\u4ea7\u51fa\u8d77\u7740\u81f3\u5173\u91cd\u8981\u7684\u4f5c\u7528\u3002\u5bf9\u4e8e\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u5de5\u827a\u8154\u5ba4\u800c\u8a00\uff0c\u7531\u5bf9\u6c1f\u6c14\u6216\u542b\u6c1f\u6c14\u4f53\u8fdb\u884c\u52a0\u70ed\u6216\u7b49\u79bb\u5b50\u4f53\u6d3b\u5316\u4ea7\u751f\u7684\u6c1f\u81ea\u7531\u57fa\u662f\u9996\u9009\u7684\u539f\u4f4d\u6e05\u6d17\u5242\u3002\u5b83\u4eec\u4e0e\u7845\u3001\u4e8c\u6c27\u5316\u7845\u3001\u6c2e\u5316\u7845\u3001\u94a8\u3001\u94dd\u7b49\u4ee5\u53ca\u6709\u673a\u6c61\u67d3\u7269\u6709\u5f88\u9ad8\u7684\u53cd\u5e94\u6027\uff0c\u52a0\u4e0a\u53cd\u5e94\u4ea7\u7269\u5177\u6709\u6325\u53d1\u6027\uff0c\u8fd9\u786e\u4fdd\u8154\u5ba4\u8868\u9762\u7684\u5fae\u7c92\u548c\u5206\u5b50\u6c61\u67d3\u7269\u80fd\u591f\u88ab\u6e05\u6d17\u5e72\u51c0\u3002<\/p>\n\n\n\n<p>\u53ef\u8fde\u7eed\u6027\u4f7f\u7528\u662f\u8861\u91cf\u5de5\u827a\u8fdb\u6b65\u7684\u4e00\u4e2a\u65b0\u6307\u6807\uff0c\u4e3a\u4e86\u786e\u4fdd\u65b0\u5de5\u827a\u5b8c\u5168\u6210\u529f\uff0c\u5e94\u8be5\u5728\u4e0b\u5217\u80fd\u591f\u6709\u6240\u6539\u8fdb\uff1a<\/p>\n\n\n\n<p>\u66f4\u5c11\u7684\u5bf9\u73af\u5883\u7684\u5f71\u54cd\u30022008\u5e74\u56fd\u9645\u534a\u5bfc\u4f53\u6280\u672f\u53d1\u5c55\u8def\u7ebf\u56fe\u8981\u6c42\u51cf\u5c11\u9ad8\u53d8\u6696\u6f5c\u80fd\u503c\u6c14\u4f53\u7684\u4f7f\u7528\u548c\u6392\u653e\uff0c\u5728\u8fd9\u4e9b\u6c14\u4f53\u4e2d\u7528\u91cf\u6700\u5927\u7684\u662f\u4e09\u6c1f\u5316\u6c2e\uff08NF<sub>3<\/sub>\uff09\uff0c\u968f\u7740\u6db2\u6676\u663e\u793a\u5668LCD, LED\u9762\u677f\u7684\u5927\u91cf\u751f\u4ea7\uff0c\u4e09\u6c1f\u5316\u6c2e\u7684\u7528\u91cf\u6025\u5347\u3002<\/p>\n\n\n\n<p>\u8fdb\u4e00\u6b65\u7814\u7a76\uff0c\u5bf9\u8584\u819c\u5149\u4f0f\u592a\u9633\u80fd\u7535\u6c60\u751f\u4ea7\uff0c\u663e\u793a\u4e09\u6c1f\u5316\u6c2e\u7684\u7528\u91cf\u5c06\u8d85\u8fc7\u534a\u5bfc\u4f53\u548c\u6db2\u6676\u9762\u677f\u9886\u57df\u3002\u4e09\u6c1f\u5316\u6c2e\u7684\u8fd9\u4e00\u4f7f\u7528\u89c4\u6a21\u4fc3\u4f7f\u4e86Michael Prather \uff08\u8bfa\u8d1d\u5c14\u548c\u5e73\u5956\u83b7\u5f97\u8005-\u653f\u5e9c\u95f4\u6c14\u5019\u53d8\u5316\u4e13\u95e8\u5c0f\u7ec4\u7684\u4e3b\u8981\u4f5c\u8005\uff09\u5c06\u4e09\u6c1f\u5316\u6c2e\u5217\u4e3a\u201c\u4eac\u90fd\u8bae\u5b9a\u4e66\u9057\u6f0f\u6389\u7684\u6e29\u5ba4\u6c14\u4f53\u201d\u3002\u8054\u5408\u56fd\u6c14\u5019\u4f1a\u8c08\u628a\u4e09\u6c1f\u5316\u6c2e\u5217\u5165\u5230\u5c06\u57282012\u5e74\u53ca\u4e4b\u540e\u66ff\u4ee3\u4eac\u90fd\u8bae\u5b9a\u4e66\u7684\u65b0\u534f\u8bae\u7684\u9650\u5236\u6392\u653e\u6c14\u4f53\u540d\u5355\u5185\uff0c\u800c\u73af\u5883\u76d1\u6d4b\u4e5f\u663e\u793a\u4e86\u5927\u6c14\u4e2d\u7684\u4e09\u6c1f\u5316\u6c2e\u542b\u91cf\u6b63\u6709\u51e0\u500d\u6570\u7684\u589e\u957f\u3002<\/p>\n\n\n\n<p>\u5f62\u6210\u5bf9\u6bd4\u7684\u662f\uff0c\u6c1f\u6c14\u7684\u5168\u7403\u53d8\u6696\u6f5c\u80fd\u503c\u4e3a0\uff0c\u8003\u8651\u5230\u975e\u73b0\u573a\u751f\u4ea7\u7684\u4e09\u6c1f\u5316\u6c2e\u8fd8\u9700\u8981\u989d\u5916\u7684\u5316\u5de5\u5408\u6210\u3001\u5904\u7406\u548c\u5371\u5316\u54c1\u8fd0\u8f93\u8f66\u7684\u7535\u529b\u3001\u71c3\u6cb9\u9700\u6c42\uff0c\u73b0\u573a\u5236\u6c1f\u7684\u603b\u78b3\u4f1a\u6bd4\u4e09\u6c1f\u5316\u6c2e\u5c11\u5f88\u591a\u500d\u3002<\/p>\n\n\n\n<p>\u66f4\u9ad8\u7684\u751f\u4ea7\u7387\u3002\u76f8\u6bd4\u4e09\u6c1f\u5316\u6c2e\u548c\u5176\u4ed6\u542b\u6c1f\u6c14\u4f53\uff0c\u6c1f\u6c14\u8f83\u5f31\u7684\u952e\u79bb\u89e3\u80fd\u4f7f\u5de5\u827a\u80fd\u591f\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u8fdb\u884c\u66f4\u5feb\u66f4\u8282\u7ea6\u6210\u672c\u7684\u6e05\u6d17\u3002\u5bf9\u4e8e300\u6beb\u7c73\u6676\u5706\u7845\u7247\u7684\u6c14\u76f8\u6c89\u79ef\u5de5\u827a\uff0c\u5728\u673a\u53f0\u4e0a\u8fdb\u884c\u8154\u5ba4\u6e05\u6d17\u65f6\uff0c\u76f8\u6bd4\u4e09\u6c1f\u5316\u6c2e\uff08NF3\uff09\u6216\u4e09\u6c1f\u5316\u6c2f\uff08CLF3\uff09\uff0c\u6c1f\u6c14\u80fd\u591f\u51cf\u5c11\u6e05\u6d17\u65f6\u95f4\u53c8\u4ec5\u9700\u8f83\u4f4e\u6e29\u5ea6\uff0c\u4ece\u800c\u5ef6\u957f\u4e86\u8154\u5ba4\u77f3\u82f1\u5143\u4ef6\u7684\u5bff\u547d\uff0c\u5728\u5355\u4e00\u57fa\u672c\u5e73\u53f0\u4e0a\u8fdb\u884c\u7684\u7814\u7a76\u8868\u660e\uff0c\u53ea\u9700\u7528\u539f\u4f4d\u5c04\u9891\u7b49\u79bb\u5b50\u4f53\u6e90\u5c31\u80fd\u591f\u6709\u6548\u6fc0\u6d3b\u6c1f\u6c14\u3002<\/p>\n\n\n\n<p>\u5728\u53ef\u6bd4\u7684\u5927\u6d41\u91cf\u60c5\u51b5\u4e0b\uff0c\u76f8\u6bd4\u4e09\u6c1f\u5316\u6c2e\u6c14\u4f53\uff0c\u6c1f\u6c14\u5bf9\u6c2e\u5316\u7845\u3001\u4e8c\u6c27\u5316\u7845\u3001\u975e\u6676\u7845\u7684\u6e05\u6d17\u65f6\u95f4\u51cf\u5c11\u4e8650%\u4ee5\u4e0a\u3002\u56e0\u4e3a\u5728TFT-LCD\u548c\u8584\u819c\u5149\u4f0f\u5236\u9020\u4e2d\u4f1a\u7528\u5230\u66f4\u5927\u5c3a\u5bf8\u7684\u8154\u5ba4\u548c\u66f4\u9ad8\u7684\u6c14\u4f53\u6d41\u91cf\uff0c\u8fdc\u7a0b\u6fc0\u6d3b\u662f\u6fc0\u6d3b\u65b9\u6cd5\u7684\u4e00\u4e2a\u9009\u62e9\u3002\u4f7f\u7528\u540c\u6837\u7684\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u6e90\uff0c\u6c1f\u6c14\u4ea7\u751f\u7684\u6c1f\u81ea\u7531\u57fa\u6570\u91cf\u662f\u4e09\u6c1f\u5316\u6c2e\u4ea7\u751f\u6570\u76843.3\u500d\uff0c\u800c\u4e14\u7531\u4e8e\u6e05\u6d17\u523b\u8680\u7387\u4e0e\u53cd\u5e94\u4ea7\u7269\u6709\u5173\uff0c\u6240\u4ee5\u4f1a\u76f4\u63a5\u51cf\u5c11\u4e00\u5b9a\u6bd4\u4f8b\u7684\u6e05\u6d17\u65f6\u95f4\u3002\u6c1f\u6c14\u76f8\u6bd4\u4e09\u6c1f\u5316\u6c2e\u66f4\u5927\u7684\u5de5\u827a\u4f18\u52bf\u662f\u7531\u51e0\u4e2a\u53c2\u6570\u663e\u793a\u51fa\u7684\u201c\u8d39\u7528\u201d\u8282\u7ea6\u3002\u6e05\u6d17\u65f6\u95f4\u80fd\u591f\u663e\u8457\u7f29\u51cf66%\u4ee5\u4e0a\uff0c\u6216\u5168\u653e\u5f03\u4f7f\u7528\u5b83\u800c\u91cd\u65b0\u4f7f\u7528\u539f\u4f4d\u6e05\u6d17\u6c14\u4f53\u6d3b\u5316\u3002\u9664\u4e86\u4e0a\u8ff0\uff0c\u5176\u5b83\u7684\u6210\u672c\u8282\u7ea6\u8fd8\u6765\u81ea\u6c14\u4f53\u6d88\u8017\u91cf\u7684\u51cf\u5c11\u4ee5\u53ca\u7531\u4e8e\u51cf\u5c11RPS\u6216RF\u52a8\u529b\u6d88\u8017\u800c\u83b7\u5f97\u7684\u80fd\u6e90\u8282\u7ea6\u3002<\/p>\n\n\n\n<p>\u6539\u8fdb\u7684\u5b89\u5168\u6027\u3002\u67d0\u56fd\u9645\u6c14\u4f53\u516c\u53f8\u73b0\u573a\u5236\u6c1f\u7cfb\u7edf\u5df2\u80fd\u591f\u7b26\u5408\u534a\u5bfc\u4f53\u3001\u6db2\u6676\u9762\u677f\u548c\u5149\u4f0f\u884c\u4e1a\u7684\u4e25\u82db\u7684\u5b89\u5168\u6027\u548c\u53ef\u9760\u6027\u5404\u79cd\u5178\u578b\u7684\u6e05\u6d17\u6c14\u4f53\u7684\u5168\u7403\u53d8\u6696\u6f5c\u80fd\u503c\u5bf9\u6bd4Cleaning GasAtmospheric Lifetime [years] \uff0cGWP [equivalent kg\uff0cCO2 \/ kg]100 year\uff0cCF4 50,000 6500\uff0cC2F6 10,000 9200\uff0cC3F8 2600 7000\uff0cSF6 3200 23,900<\/p>\n\n\n\n<p>NF3 740 17,200\uff0cF2 0 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class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" src=\"http:\/\/www.chinagases.cc\/wp-content\/uploads\/2023\/07\/image-1.png\" alt=\"\" class=\"wp-image-864\" width=\"288\" height=\"384\" srcset=\"http:\/\/www.chinagases.cc\/wp-content\/uploads\/2023\/07\/image-1.png 706w, http:\/\/www.chinagases.cc\/wp-content\/uploads\/2023\/07\/image-1-225x300.png 225w\" sizes=\"(max-width: 288px) 100vw, 288px\" 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\u6bcf\u4e00\u4e2a\u8109\u51b2\u5207\u96640.25\u03bcm\u7684\u6df1\u5ea6\u3002\u76ee\u524d\u591a\u6570\u4e3a\u6c14\u4f53\u6fc0\u5149\u673a,\u5229\u7528\u9ad8\u538b\u7535\u80fd\u4f5c\u4e3a\u6fc0\u52b1\u6e90\u6fc0\u53d1\u6fc0\u5149\u8154\u5185\u7684\u5de5\u4f5c\u7269\u8d28( \u6c1f\u5316\u6c29\u6c14\u4f53\uff0c\u4e5f\u5c31\u662f\u4ee5\u67d0\u4e2a\u6307\u5b9a\u6d53\u5ea6\u6c1f\u6c14\u4e3a\u6838\u5fc3\u5143\u7d20\u7684\u6df7\u5408\u6c14\u4f53\uff0c\u7528\u6c16\u6c14\u6216\u8005\u6c26\u6c14\u4f5c\u4e3a\u5e73\u8861\u6c14\u4f53) , \u4ece\u800c\u5b9e\u73b0\u7c92\u5b50\u7684\u53cd\u8f6c, \u5728\u6fc0\u5149\u8154\u5185\u5f62\u6210\u6fc0\u5149\u632f\u8361, \u5411\u5916\u8f93\u51fa\u6fc0\u5149\u3002\u56e0\u4e3a\u9ad8\u538b\u7535\u53ef\u8fbe\u5230\u51e0\u5343\u4f0f\u7279, \u6545\u5fc5\u987b\u5728\u5916\u5c42\u7528\u91d1\u5c5e\u677f\u8fdb\u884c\u4e25\u5bc6\u5c4f\u853d\u4ee5\u9632\u7535\u6d41\u7684\u5916\u6f0f\u5bfc\u81f4\u5371\u9669\u3002\u6fc0\u5149\u5934\u7531\u6cf5\u6d66\u6e90\u3001\u5de5\u4f5c\u4ecb\u8d28\u548c\u8c10\u632f\u8154\u6fc0\u5149\u8154\u548c\u6fc0\u5149\u7535\u6781\u7b49\u7ec4\u6210, \u662f\u6fc0\u5149\u673a\u7684\u6700\u91cd\u8981\u90e8\u5206\u3002<\/p>\n\n\n<a href=\"http:\/\/www.chinagases.cc\/wp-content\/uploads\/2021\/11\/fluorine-and-its-function-202507.pdf\" class=\"pdfemb-viewer\" style=\"\" data-width=\"max\" data-height=\"max\"  data-toolbar=\"bottom\" data-toolbar-fixed=\"on\">fluorine-and-its-function-202507<br\/><\/a>\n<p class=\"wp-block-pdfemb-pdf-embedder-viewer\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6280\u672f\u6307\u6807 \u9879 \u76ee \u8d28 \u91cf \u6307 \u6807 F2 % \uff08V\/V\uff09 \u2265 99.0 CF4 % (V\/V) \u2264 0.05 \u7a7a &hellip; <\/p>\n<p class=\"link-more\"><a href=\"http:\/\/www.chinagases.cc\/?p=191\" class=\"more-link\">\u7ee7\u7eed\u9605\u8bfb<span class=\"screen-reader-text\">\u201c\u6c1f\u6c14 F2\u201d<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_mi_skip_tracking":false},"categories":[21],"tags":[32],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.6 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\r\n<title>\u6c1f\u6c14 F2 - \u8d5b\u7f8e\u7279 SUMMIT CHEMICALS &amp; GASES LTD<\/title>\r\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\r\n<link rel=\"canonical\" href=\"http:\/\/www.chinagases.cc\/?p=191\" \/>\r\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\r\n<meta property=\"og:type\" content=\"article\" \/>\r\n<meta property=\"og:title\" content=\"\u6c1f\u6c14 F2 - \u8d5b\u7f8e\u7279 SUMMIT CHEMICALS &amp; 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